Specimen-holding device for electron microscope

Details Specimen-holding device for electron microscope Specimen-holding device for electron microscope

1995-10-19

1996-12-03

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

25044111, H01J 3720

Patent

active

055810888

ABSTRACT:
A simple specimen-holding device for use with an ultra-high resolution transmission electron microscope. The device comprises a cylindrical support member inserted in the specimen chamber of the microscope, a spherical bearing formed on the inner surface of the front end of the support member, a first pipe, a second pipe rotatably mounted inside the first pipe, a third pipe mounted in the second pipe, a specimen-holding rod, bellows between the second and third pipes, an isolation valve mounted between the first pipe and the specimen chamber, and a mechanism for opening and closing the isolation valve, utilizing rotation of the second pipe. The first pipe is swung about the spherical bearing by at least a y-motion drive means and z-motion drive means. The third pipe can be slid by an x-motion drive means. The rod is slidably mounted in the third pipe via an O-ring.

REFERENCES:
patent: 4101778 (1978-07-01), Von Rauch et al.
patent: 4405865 (1983-09-01), Genty et al.

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