Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1994-06-27
1996-12-03
Lesmes, George F.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430325, 430326, 430910, G03C 1492, G03C 500
Patent
active
055806945
ABSTRACT:
The present invention relates to a radiation-sensitive resist composition comprising (a) a radiation-sensitive acid generator, (b) a substituted androstane, and (c) a copolymer binder. The copolymer binder comprises (meth)acrylic/(meth)acrylate copolymer.
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Allen Robert D.
DiPietro Richard A.
Wallraff Gregory M.
Codd Bernard P.
International Business Machines - Corporation
Lesmes George F.
Martin Robert B.
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