Process for producing monocrystalline layer on insulator

Details Process for producing monocrystalline layer on insulator Process for producing monocrystalline layer on insulator

1984-03-22

1987-04-21

Lacey, David L.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156DIG73, 156DIG80, 156DIG88, 156DIG102, 427 531, C30B 1322

Patent

active

046594221

ABSTRACT:
A process for producing a monocrystalline layer on an insulator, particularly in a semiconductor wafer adapted for use to produce large-scale integrated circuits, comprising the steps of providing a nonmonocrystalline layer on an insulator and heating a region of the nonmonocrystalline layer by irradiating it from two heat sources while moving the heat sources relative to the nomonocrystalline layer, thereby locally melting and transforming the nonmonocrystalline layer to a monocrystalline layer.

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Hess et al., "Laser Annealing", Industrial Research Development, Nov. 1979, pp. 141-152.

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