Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent
1993-02-19
1995-01-17
Limanek, Robert
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
257752, 257763, 257915, H01L 2992
Patent
active
053828178
ABSTRACT:
A semiconductor device capable of improving pressure-resistant and leakage-resistant characteristics of a stacked type capacitor formed on a planarized insulating layer. The semiconductor device includes a plug electrode layer 313 of at least one material selected from the group consisting of TiN, Ti, W, and WN, buried in a contact hole 311a of an interlayer insulating films 311 and extending on and along the upper surface of interlayer insulating film 311. As a result, creation of a stepped portion on platinum layer 314 constituting a capacitor lower electrode to be formed on the plug electrode 313 is prevented, and the thickness of a PZT film 315 to be formed on platinum layer 314 is not disadvantageously made thin at the stepped portion. Therefore, the space between a capacitor upper electrode 316 and platinum layer 314 constituting the capacitor lower electrode can not be made narrow, and an electric field between platinum layer 314 and capacitor upper electrode 316 is made uniform, enhancing pressure-resistant and leakage-resistant characteristics. Also, a silicification reaction of platinum layer 314 is prevented due to plug electrode layer 313. In addition, when plug electrode layer 313 is formed of Ti or TiN, adhesion of plug electrode layer 313 and interlayer insulating film 311 is improved, and thus separation of platinum layer 314 is prevented.
REFERENCES:
patent: 5005102 (1991-04-01), Larson
patent: 5046043 (1991-09-01), Miller et al.
"Barrier layers for realization of high capacitance density in SrTiO thin-film capacitor or silicon", by Toshiyuki Sakuma et al., Appl. Phys. Lett., vol. 57, No. 23, Dec. 3, 1990, pp. 2431-2433.
Itoh Hiromi
Kashihara Keiichiro
Limanek Robert
Mitsubishi Denki & Kabushiki Kaisha
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