Method of synthesizing hard material

Details Method of synthesizing hard material Method of synthesizing hard material

1993-06-17

1995-07-25

Beck, Shrive

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

427576, 427577, 427215, B05D 306

Patent

active

054360366

ABSTRACT:
A method of vapor-phase synthesizing a hard material use a raw material gas supplied into a reaction tube (6) while irradiating a region of the reaction tube (6) with microwaves (18) of a prescribed frequency for causing a synthesizing reaction to produce the hard material along a prescribed direction, by a plasma generation. In the reaction tube (6), at least two plate electrodes (17a, 17b, 19a, 19b) are oppositely arranged in parallel vertically to electric fields of the microwaves (18), so that the plasma is excited between the plate electrodes (17a, 17b, 19a, 19b) for vapor-phase synthesizing the hard material. The microwaves (18) of high electric power are introduced into the reaction tube (6) through a waveguide (5) without loss, so that strong electric fields can be homogeneously and stably distributed between the opposite plate electrodes.

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Bachmann, P. K. et al, "Emerging Technology of Diamond Thin Films"; Chemical & Engineering News May 15, 1989 pp. 24-38.
1046B Extended Abstracts/Electrochemical Society 87-2 (1987), Princeton, New Jersey, USA, Abstract No.: 1103, p. 1536, article entitled: "Deposition of Boron Nitride In A Microwave Discharge" By Matsumoto et al.

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