Scanning tunneling microscope

Details Scanning tunneling microscope Scanning tunneling microscope

1993-12-06

1995-08-01

Dzierzynski, Paul M.

Radiant energy

Inspection of solids or liquids by charged particles

H01J 37252

Patent

active

054381967

ABSTRACT:
A scanning tunneling microscope having a scanner driven in three dimensions. A conducting tip is attached to the front end of the scanner. A voltage is applied between the tip and a specimen. Movement of the tip is controlled so that the resulting tunneling current is maintained constant. A scanning tunneling microscope (STM) image is created from a control signal for controlling the movement of the tip. The microscope is equipped with a secondary electron detector for detecting secondary electrons emitted from the specimen when the voltage applied between the tip and the specimen is increased. A secondary electron image originating from the same field of view as the STM image is derived.

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"A scanning tunneling microscope controlled field emission microprobe system", T. H. P. Chang, D. P. Kern, M. A. McCord and L. P. Muray, J. Vac. Sci Technol. B 9(2), Mar./Apr. 1991, pp. 438-443.

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