Sputtering of lithium

Details Sputtering of lithium Sputtering of lithium

1997-05-29

2000-03-21

Nguyen, Nam

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20419233, C23C 1434

Patent

active

060398507

ABSTRACT:
Lithium is sputtered from a target with a metallic lithium surface using an alternating sputtering potential with a frequency between about 8 and about 120 kHz, preferably about 10-100 kHz or using a DC sputtering potential and a reverse cleaning potential applied intermittently. The process can be used to apply lithium to electrochromic materials such as coatings on window glass.

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