Scanning tunneling microscope

Details Scanning tunneling microscope Scanning tunneling microscope

1986-03-05

1987-05-26

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250423F, G01N 2300, G12B 100

Patent

active

046688650

ABSTRACT:
An improved scanning tunneling microscope comprising a semiconductor chip into which slots are etched to form a central portion linked by a first pair of stripes to an intermediate portion, which in turn is linked by a second pair of stripes to the main body of the chip. The pairs of stripes have mutually orthogonal directions to allow the center portion to perform movements in the x- and y-directions under the control of electrostatic forces created between the stripes and their opposite walls. The center portion has formed into it at least one tongue carrying an integrated, protruding tunnel tip which is capable of being moved in the z-direction by means of electrostatic forces between said tongue and the bottom of a cavity below the tongue.

REFERENCES:
patent: 4203128 (1980-05-01), Guckel et al.
patent: 4343993 (1982-08-01), Binnig et al.
Drake et al., "Tunneling Microscope for Operation in Air or Fluids," Rev. Sci. Instrum., 57(3), Mar. 1986.
Gerber et al., "Scanning Tunneling Microscope Combined With a Scanning Electron Microscope," Rev. Sci. Instrum. 57(2), Feb. 1986.
Angell et al., "Silicon Micromechanical Devices," Scientific American, vol. 248, No. 4, pp. 36-47 (Apr. 1983).

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