Semiconductor sensor of electrostatic capacitance type

Details Semiconductor sensor of electrostatic capacitance type Semiconductor sensor of electrostatic capacitance type

1992-02-21

1994-02-08

Mintel, William

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

257418, 257419, 73718, 73724, 73517R, 3612831, H01L 2984

Patent

active

052850978

ABSTRACT:
A semiconductor sensor has a semiconductor substrate including both of a conductive or semiconductor surface and an insulative surface and a pair of conductive members provided on said conductive or semiconductor surface of the substrate. There is constructed a sensor section in which at least one of the pair of conductive members can be deformed and an electrostatic capacitance between the pair of conductive members is variable. The semiconductor substrate has a functional element which is electrically connected to the sensor section.

REFERENCES:
patent: 4357834 (1982-11-01), Kimura
patent: 4628403 (1986-12-01), Kuisma
patent: 4875134 (1989-10-01), Kuisma
patent: 5012304 (1991-04-01), Kash et al.
patent: 5048343 (1991-09-01), Oboodi et al.

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