Phase-contrast electron microscope and phase plate therefor

Details Phase-contrast electron microscope and phase plate therefor Phase-contrast electron microscope and phase plate therefor

1996-12-17

1998-09-29

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

H01J 3726

Patent

active

058148159

ABSTRACT:
An electrostatic potential in a vacuum in the vicinity of a focused electron beam of a direct wave formed on an optical axis of a back focal plane of an objective lens used in an electron microscope can be externally controlled. Therefore, the electrostatic potential is controlled by supplying an electric potential to a ring-shaped electrode from the outside. The outer sides of the electrode are interposed between both of insulators and conductors so as to shield the electrostatic potential against the outer side of a ring, whereby a phase shift is supplied only to an electron beam that passes through the inside of the ring. A phase-contrast electron microscope can be realized which includes a phase plate corresponding to an electron beam, which is capable of observing a phase object with contrast.

REFERENCES:
patent: 3500043 (1970-03-01), Hanssen
patent: 3596090 (1971-07-01), Hoppe
patent: 4935625 (1990-06-01), Hasegawa et al.
MRC Laboratory of Molecular Biology, Cambridge, UK, P.N.T. Unwin: A New Electron Microscope Imaging Method for Enhancing Detail in Thin Biological Specimens; Z. Naturforsch. 29 a, 158-163 (1974).
Physical Review Letters, vol. 74, No. 3, 16 Jan. 1995, A. Orchowski et al.: Electron Holography Surmounts Resolution Limit of Electron Microscopy, pp. 399-402.
Applied Optics, vol. 13, No. 11, Nov. 1974; J.H. Bruning et al.: Digital Wavefront Measuring Interferometer for Testing Optical Surfaces and Lenses.
Applied Optics, vol. 19, No. 1, 1 Jan. 1980; N.A. Massie: Real-time digital heterodyne interferometry: a system.
Optical Engineering, vol. 18, No. 1, Jan.-Feb. 1979; Glen W. Johnson et al.: Phase-Locked Interferometry.
Abstract of JP 60-7048, 14 Jan. 1985, Hitachi Seisakusho K.K., application no. 58-112718 filed 24 Jun. 1983.

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