Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1997-11-13
1999-04-27
Ramsey, Kenneth J.
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
C23C 1434
Patent
active
058977546
ABSTRACT:
In a quartz glass tube body for high-pressure discharge lamp, the devitrification occurs during lighting, a light flux decreases and finally the useful life ends, where the main cause of this devitrification phenomenon is reaction between a sealed substance and the quartz glass tube body. It is one object of the present invention to attain the longer useful life, for example, of a high-pressure discharge lamp by preventing such a phenomenon. According to the present invention, a coating is made up by forming one or more oxynitride layers of an element chosen from among aluminum, tantalum, niobium, vanadium, chromium, titanium, zirconium, hafnium, yttrium, scandium, magnesium, silicon and lanthanum rare earth elements. By incorporating a bilayer coating on the inside wall of said hollow tube body, for example, that is composed of an aluminum oxynitride layer and an aluminum nitride layer obtained from application of a high-frequency wave between the sputter electrodes and generation of a glow discharge, a durable coating can be formed, thereby enabling the useful life of a high-pressure discharge lamp to be lengthened.
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EP Search Report dated Apr. 16, 1998 corresponding to Application No. EP 95 11 4825.
Fujii Ken-ichi
Takeda Mamoru
Matsushita Electric - Industrial Co., Ltd.
Ramsey Kenneth J.
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