Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1999-05-10
2000-02-29
Gibson, Sharon
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
2960301, 430313, 430319, G11B 5127
Patent
active
060307536
ABSTRACT:
A magnetoresistive (MR) head and a method are disclosed providing a longitudinal bias layer and conductor leads at end regions of sensor elements to form a sensor region between the end regions. A uniform longitudinal bias thin film layer is deposited overlaying the entirety of the upper MR sensor, and a uniform conductor thin film layer is deposited overlaying the entirety of the longitudinal bias thin film layer. A photoresist process is conducted over the conductor thin film layer to develop a mask of the end regions and to expose a central region between the end regions. A reactive-ion-etching process completely etches the conductor thin film layer in the exposed central region to expose the longitudinal bias layer in the central region, the photoresist mask is removed, and an ion milling process of the exposed longitudinal bias layer at the central region reduces the bias layer from a "bias" critical thickness to a "null" critical thickness to free the MR sensor elements, thereby forming a defined sensor region of the underlying MR sensor elements at the exposed longitudinal bias layer at the central region.
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Gibson Sharon
Holcombe John H.
Holloman Jill N.
International Business Machines - Corporation
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