Predecomposition of organic chlorides for silicon processing

Details Predecomposition of organic chlorides for silicon processing Predecomposition of organic chlorides for silicon processing

1995-02-06

1997-02-04

Wright, Lee C.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

1566621, 134 1, 134 11, 134 12, 437225, 437239, 437946, H01L 21306

Patent

active

055994253

ABSTRACT:
A process for the use of organic chlorides having the general formula C.sub.x H.sub.y Cl.sub.y, C.sub.z Cl.sub.s, C.sub.r O.sub.u Cl.sub.2(r-u+1), C.sub.r O.sub.u Cl.sub.r-u+1 H.sub.r-u+1, wherein x=1-10, more preferably 1-6; y=x+1, x or x-1; z=1-10, more preferably 1-6; s=2(x+1, x or x-1), r=1-10, more preferably 2-4; u=1, 2 and up to r, as precursors for decomposition to chlorine and oxygen-containing reactive reagents for subsequent use for vapor cleaning of silicon, thermal oxidation of silicon in a range of 200.degree. C.-1200.degree. C., rapid thermal oxidation of silicon and silicon polishing or etching.

REFERENCES:
patent: 3795557 (1974-03-01), Jacob
patent: 3837905 (1974-09-01), Hile et al.
patent: 4789426 (1988-12-01), Pipkin
patent: 5288662 (1994-02-01), Lagendijk et al.
patent: 5298075 (1994-03-01), Lagendijk et al.

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