Method of forming a hard carbon film over the inner surface of a

Details Method of forming a hard carbon film over the inner surface of a Method of forming a hard carbon film over the inner surface of a

1999-03-02

2000-08-01

Beck, Shrive

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

427237, 4272497, H05H 124, C23C 1626

Patent

active

060963905

ABSTRACT:
A hard carbon film is formed over an inner surface of a guide bush by the steps of disposing the guide bush in a vacuum vessel, inserting an electrode into a center bore of the guide bush and applying a positive current to the electrode, introducing a gas, containing carbon, through a gas inlet port into the vacuum chamber after evacuating the vacuum vessel, and producing a plasma in the vacuum vessel to form a hard carbon film of hydrogenated amorphous carbon over the inner surface of the guide bush by a plasma CVD method.

REFERENCES:
patent: 5879763 (1999-03-01), Sugiyama et al.
patent: 5922418 (1999-07-01), Koike et al.
patent: 5939152 (1999-08-01), Sugiyama et al.

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