Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Patent
1997-10-06
1999-10-12
King, Roy V.
Coating processes
Direct application of electrical, magnetic, wave, or...
Plasma
427237, 427238, 427239, 4272557, 427249, 427122, B05D 306, B05D 722, C23C 1626
Patent
active
059652179
ABSTRACT:
The present invention relates to a method of forming a two-layer intermediate film over the inner surface of a cylindrical member, such as a bushing or a cylinder, with a DLC film being formed on the intermediate film with a uniform thickness by using an auxiliary electrode, greatly enhancing of abrasion resistance of the inner surface. The cylindrical member is placed in a vacuum vessel, an auxiliary electrode of a first intermediate film forming material is inserted in the bore of the cylindrical member, a sputtering gas is supplied into the vacuum vessel, keep the auxiliary electrode at ground potential or a negative DC voltage is applied to the auxiliary electrode to produce a plasma around the auxiliary electrode in order that a first intermediate film is formed over the inner surface of the cylindrical member. A gas containing silicon or germanium is supplied into the vacuum vessel in which the cylindrical member and the auxiliary electrode are disposed, and a voltage is applied to the cylindrical member to produce a plasma, thereby forming a second intermediate film on the first intermediate film. Subsequently, a gas containing carbon, such as methane or the like, is supplied into the vacuum vessel in which the cylindrical member and the auxiliary electrode are disposed, and a voltage is applied to the cylindrical member to produce a plasma in the vacuum vessel in order that the DLC film is formed on the previously formed second intermediate film over the inner surface of the cylindrical member.
REFERENCES:
patent: 5690745 (1997-11-01), Grunwald et al.
patent: 5798139 (1998-08-01), Nagashima et al.
Koike Ryota
Miya Yukio
Sekine Toshiichi
Sugiyama Osamu
Toida Takashi
Citizen Watch Co. Ltd.
King Roy V.
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