Method of determination of a three-dimensional profile of an obj

Details Method of determination of a three-dimensional profile of an obj Method of determination of a three-dimensional profile of an obj

1993-06-22

1995-05-16

Hille, Rolf

Optics: measuring and testing

By polarized light examination

With light attenuation

356380, 356387, 250332, 250334, G01B 1124, G01B 1128, G01B 1102

Patent

active

054165911

ABSTRACT:
A light beam is emitted to a target point on a target, so that the reflected light beam from the target point forms an illumination spot on a array sensor. The array sensor comprises a plurality of light receiving elements. The receiving elements are divided into a plurality of repeating units consisting of the same number of the receiving elements. The receiving elements in each of the repeating units are assigned respectively to different indexes. The receiving elements having the same index are commonly coupled so as to provide a single output indicative of the same index when the reflected light beam hits any one of the receiving elements. A method for determination of a three-dimensional profile of an object includes a first step of detecting a series of reference spots on the array sensor with respect to individual points obtained by scanning the light beam on a reference surface, and defining detection ranges respectively with respect to the individual reference spots, and a second step of detecting within the detection ranges a series of object spots obtained by scanning the light beam on an object surface and analyzing a positional deviation between the object spot and the corresponding reference spot within each of the detection range to determine the three-dimensional profile of the object in accordance with thus obtained positional deviations.

REFERENCES:
patent: 4627734 (1986-12-01), Rioux
patent: 5102226 (1992-04-01), Yoshimura et al.
patent: 5146293 (1992-09-01), Mercer et al.
patent: 5196900 (1993-03-01), Pettersen
patent: 5319445 (1974-06-01), Fitts

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