Method for thinning silicon

Details Method for thinning silicon Method for thinning silicon

1985-04-30

1986-10-07

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

148175, 156653, 156657, 156662, 252 793, 427 86, 427 93, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

046157620

ABSTRACT:
A method for substantially uniformly thinning a silicon layer comprises providing a silicon layer having a surface, oxidizing substantially all of the surface so as to transform a uniformly thick layer of silicon into oxide, and removing all the oxide so as to expose the silicon layer.

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