Method for manufacturing a surface grating of a defined grating

Details Method for manufacturing a surface grating of a defined grating Method for manufacturing a surface grating of a defined grating

1986-04-21

1987-06-02

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

29569L, 156651, 1566591, 156662, 252 791, 252 792, 372 44, H01L 21306, B44C 122

Patent

active

046700935

ABSTRACT:
A method for manufacturing a surface grating on a mesa structure of a laser includes etching a substrate surface by wet-chemical etching to form a surface grating of defined grating constant, masking regions of the surface grating corresponding to the mesa structure, and further etching the unmasked regions to transfer the surface grating to the more deeply situated surface regions of the mesa structure while retaining substantially the same grating constant.

REFERENCES:
patent: 4405405 (1983-09-01), Fujii et al.

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