Interdigital capacitor and method for making the same

Details Interdigital capacitor and method for making the same Interdigital capacitor and method for making the same

1993-08-06

1995-10-17

Reynolds, Bruce A.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

361311, 361326, 361303, 233246, 257532, H01G 1015

Patent

active

054596335

ABSTRACT:
The present invention relates to an interdigital capacitor and to a method for producing an interdigital capacitor having a finger structure of a coplanar stub line covered by an air bridge pocket for increasing the capacitance of the coplanar line. The air bridge pocket provides shielding for the capacitor structure. The disclosed manufacturing method includes producing a galvanic reinforcement of the center line of the coplanar line.

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R. Goyal, Monolithic Microwave Integrated Circuits: Technology & Design, Artech House, Inc. pp. 328-341, 1989.
Decoupling Capacitor Structure to Reduce Fat Output Driver Switching Noise, IBM Technical Disclosure Bulletin, vol. 30, No. 7, Dec. 1987, pp. 167-168.
Optimization of Interdigital Capacitors, John L. Hobdell, IEEE Transactions on Microwave Theory and Techniques, vol. MTT-27, No. 9, Sep. 1979, pp. 788-791.
Interdigital Capacitors and their Applications to Lumped-Element Microwave Integrated Circuits, Gary D. Alley, published in Microwave Integrated CIrcuits, J. Frey, Artech House, Inc., 1975, pp. 351-356.

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