Micro-actuator

Details Micro-actuator Micro-actuator

1993-06-07

1996-10-08

Skudy, R.

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

318116, H02N 100

Patent

active

055634664

ABSTRACT:
This invention incorporates micro-machining fabrication techniques to achieve practical electrostatic actuation forces over a length change of the order of 20 to 50 percent. It constitutes an improvement over the prior art by virtue of array designs which yield a more versatile and stronger actuator. One basic design utilizes diamond-shaped attractive elements to transmit transverse forces for longitudinal, two-way actuation. Another basic design features interlocking, longitudinally attractive elements to achieve longitudinal, two-way actuation. Other improvements include means for locking the actuator at an arbitrary displacement as well as means for amplification of either the actuation force or length change.

REFERENCES:
patent: 2975307 (1961-03-01), Schroeder
patent: 5051643 (1991-09-01), Dworsky
patent: 5124879 (1992-06-01), Goto
patent: 5206557 (1993-04-01), Bobbio

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