Cleaning and liquid contact with solids – Processes – Including work heating or contact with combustion products
Patent
1999-02-11
2000-08-22
Gulakowski, Randy
Cleaning and liquid contact with solids
Processes
Including work heating or contact with combustion products
134 12, 134 13, 134 18, 118719, 4272481, B08B 704
Patent
active
061066346
ABSTRACT:
The present invention provides methods and apparatus for reducing particulate contamination during the processing of a substrate. In one embodiment, the method includes the step of preheating a substrate in a preheater to a desired temperature. The preheated substrate is transferred from the preheater to a buffer region having a pressure therein that is between about two (2) Torr and about seven hundred and sixty (760) Torr. The preheated substrate is transferred from the buffer region to a reaction chamber. Thermophoretic forces help repel particles away from the substrate surface during substrate transfer.
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Chandrachood Madhavi
Ghanayem Steve G.
Applied Materials Inc.
Chaudhry Saeed
Gulakowski Randy
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