Metal working – Method of mechanical manufacture – Assembling or joining
Patent
1976-05-13
1978-03-21
Tupman, W.
Metal working
Method of mechanical manufacture
Assembling or joining
29588, 29589, 29610SG, 338 2, B01J 1700
Patent
active
040795080
ABSTRACT:
A transducer assembly for measuring absolute pressure utilizing a glass substrate and a thin silicon diaphragm upon which is diffused a piezoresistive bridge circuit. Bridge circuit components are properly oriented and connected to bonding pads formed on the silicon. The glass substrate has a circular well formed therein having a diameter at least as large as the diameter of the diaphragm. Conducting leads are deposited on the glass substrate in a pattern matching that of the bonding pads on the silicon. The silicon is bonded to the glass substrate with the silicon diaphragm overlying the well in the glass and the bonding pads overlying the conducting leads deposited on the glass. The bond provides a hermetic seal around the well, trapping a predetermined pressure therein which serves as a reference pressure. Ambient pressure variations cause stress variation in the diaphragm, resulting in unbalance of the bridge which can be sensed with associated circuits to give an indication of the ambient pressure.
REFERENCES:
patent: 3417361 (1968-12-01), Heller
patent: 3757414 (1973-09-01), Keller
patent: 3800264 (1974-03-01), Kurtz
patent: 3924322 (1975-12-01), Kurtz
The Board of Trustees of the Leland Stanford Junior University
Tupman W.
LandOfFree
Miniature absolute pressure transducer assembly and method does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Miniature absolute pressure transducer assembly and method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Miniature absolute pressure transducer assembly and method will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-564299