Vibratory microgyroscope

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

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7350402, G01P 900

Patent

active

057476900

ABSTRACT:
A microgyroscope includes a substrate, a vibratory structure having two stripe portions, a plurality of connection portions, and a comb, an elastic member for elastically maintaining the vibratory structure, a driver for applying the vibratory structure, a sensor for sensing the one directional action of the vibratory structure, and a plurality of sensing electrodes for sensing displacement by Coriolis force.

REFERENCES:
patent: 5349855 (1994-09-01), Bernstein
patent: 5359893 (1994-11-01), Dunn
patent: 5604312 (1997-02-01), Lutz

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