Method of manufacturing diamond thermistors

Details Method of manufacturing diamond thermistors Method of manufacturing diamond thermistors

1990-09-10

1993-02-02

Dang, Thi

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156646, 156656, 437181, 437189, 437918, 338 22R, 338225D, H01L 2100

Patent

active

051835304

ABSTRACT:
A method of manufacturing diamond thermistors is described. A pair of diamond contact regions having a low resistance are formed on a temperature sensing diamond substrate. The formation of the diamond contact regions is carried out by depositing a diamond film using a carbon compound gas and a dopant gas and etching the diamond film to leave the contact regions by an etchant comprising fluorine or oxygen.

REFERENCES:
patent: 4806900 (1989-02-01), Fujimori et al.
patent: 4886571 (1989-12-01), Suzuki et al.
patent: 4957591 (1990-09-01), Sato et al.

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