Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1992-12-09
1994-07-19
Karlsen, Ernest F.
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
324 96, 324762, G01R 1073, G01R 3102
Patent
active
053312759
ABSTRACT:
A probing device includes a minute probe in which at least an end portion is formed by conductive material, a cantilever having one end to which the probe is attached, and another end fixed to a moving member movable relatively to a sample in each direction of X, Y and Z, a unit for moving the moving member relatively to the sample, a transducing unit for generating information of voltage or current by means of light, a connecting unit having a low electric resistance, for connecting the transducing unit and the end portion of the probe, a detecting unit for detecting a change in a physical amount occurring in the cantilever by a force caused between the probe and the sample by a relative proximity of the moving member to the sample, and a voltage measuring unit for measuring a voltage at a measurement point on the sample, which is determined based on an output of the detecting unit, by way of the transducing unit when the probe is contacted with the measurement point. By the constitution, it is possible to realize a voltage measurement with both an enhanced space resolution and an enhanced time resolution. Also, by using the probing device in an integrated circuit testing apparatus or system, it is possible to realize a stable probing to a minute wiring without increasing an electrical load with respect to the minute wiring and thus contribute to an improvement in the precision of a voltage measurement.
REFERENCES:
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patent: 4603293 (1986-07-01), Mourou et al.
patent: 4749942 (1988-07-01), Sang et al.
patent: 4875006 (1989-10-01), Henley et al.
patent: 4888550 (1989-12-01), Reid
patent: 4891580 (1990-01-01), Valdmanis
Fujii Akira
Goto Yoshiro
Hama Soichi
Ito Akio
Okubo Kazuo
Fujitsu Limited
Karlsen Ernest F.
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