Method for igniting a plasma inside a plasma processing reactor

Details Method for igniting a plasma inside a plasma processing reactor Method for igniting a plasma inside a plasma processing reactor

1998-12-30

2000-02-22

Paschall, Mark

Electric heating

Metal heating

By arc

21912157, 219123, 21912143, 21912141, 156345, 118723I, 20429837, B23K 1000

Patent

active

06028286&

ABSTRACT:
The invention relates to a plasma processing reactor for processing a substrate. The plasma processing reactor includes a process chamber. The plasma processing reactor further includes an inductive coil configured to be coupled to a RF power source having a RF frequency wherein the inductive coil generates an electric field inside of the process chamber. The plasma processing reactor additionally includes a magnetic field producing device configured to produce a magnetic field inside the process chamber in proximity of the electric field.

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