Process for the separation of monolithic LED chip arrangements g

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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156656, 156657, 1566591, 156662, 437226, H01L 21306, B44C 122, C23F 102, C03C 1500

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049293001

ABSTRACT:
LED chip arrangements fabricated monolithically on a semiconductor substrate wafer are to be separated from one another by scribing in such a way that they can be properly arrayed to obtain a tight image-dot grid over several LED chip arrangements. The metallization of the back side of the semiconductor substrate wafer is exposed in the area of a prescribed separation track. Prior to the separation, a depression is etched into the back side of the semiconductor substrate wafer.
The process according to the invention is particularly useful in the manufacture of high-resolution LED arrays.

REFERENCES:
patent: 4237601 (1980-12-01), Wodhouse et al.
Patent Abstracts of Japan, vol. 9, No. 136 (E-320), (1859), Jun. 12, 1985, Abstract No. 60-20590 (A).
Standard European Search Report; Feb. 13, 1989; 3 pages.

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