Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1989-08-04
1990-05-29
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156656, 156657, 1566591, 156662, 437226, H01L 21306, B44C 122, C23F 102, C03C 1500
Patent
active
049293001
ABSTRACT:
LED chip arrangements fabricated monolithically on a semiconductor substrate wafer are to be separated from one another by scribing in such a way that they can be properly arrayed to obtain a tight image-dot grid over several LED chip arrangements. The metallization of the back side of the semiconductor substrate wafer is exposed in the area of a prescribed separation track. Prior to the separation, a depression is etched into the back side of the semiconductor substrate wafer.
The process according to the invention is particularly useful in the manufacture of high-resolution LED arrays.
REFERENCES:
patent: 4237601 (1980-12-01), Wodhouse et al.
Patent Abstracts of Japan, vol. 9, No. 136 (E-320), (1859), Jun. 12, 1985, Abstract No. 60-20590 (A).
Standard European Search Report; Feb. 13, 1989; 3 pages.
Indyk Eugene S.
Morrow James G.
Powell William A.
Siemens Aktiengesellschaft
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