Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1991-01-02
1994-07-19
Nguyen, Nam
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20419215, 427570, 427573, 427575, 427595, C23C 1434, B05D 306
Patent
active
053306309
ABSTRACT:
The first fire voltage of chalcogenide-based switching devices is lowered to a value approximately equal to the threshold voltage by treatment of the chalcogenide material with fluorine either during or after deposition.
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Klersy Patrick J.
Ovshinsky Stanford R.
Energy Conversion Devices Inc.
Nguyen Nam
Siskind Marvin S.
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