Method of making optical replicas by stamping in photoresist and

Details Method of making optical replicas by stamping in photoresist and Method of making optical replicas by stamping in photoresist and

1998-07-02

2000-02-22

Osele, Mark A.

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

156232, 156240, 156247, 156289, 427152, 216 41, B44C 1165, B44C 122, B32B 3100, B41M 312

Patent

active

060275952

ABSTRACT:
Optical structures are replicated in photoresist on a substrate using a stamp. The transfer of the pattern into the liquid photoresist and the provision on the substrate can be achieved using manual pressures. Various techniques may be used to remove air from the liquid photoresist. The stamp is removed once the liquid photoresist is fully solidified. These structures in solidified photoresist may serve as optical elements or may be accurately transferred into the substrate. The stamp may be for an entire wafer.

REFERENCES:
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patent: 5512131 (1996-04-01), Kumar et al.
patent: 5575878 (1996-11-01), Cox et al.
Philippe Nussbaum et al., "Simple technique for replication of micro-optical elements" Optical Engineering, vol. 37 No. 6, Jun. 1998, pp. 1804-1807.
Xiao-Mei Zhao et al., "Fabrication of Three-Dimensional Micro-Structures: Microtransfer Molding" Adv. Mater Jan. 1996 pp. 837-840.
Younan Xia et al., "Complex Optical Surfaces Formed by Replica Molding Against Elastomeric Masters" Science, vol. 273, Jul. 19, 1996, pp. 347-349.
George M. Whitesides et al., "Replica molding: Complex optics at lower costs" Photonics Spectra, Jan. 1997, pp. 90-91.
Xiao-Mei Zhao et al., "Demonstration of waveguide couplers fabricated using microtransfer molding" Appl. Phys. Lett., vol. 71, No. 8, Aug. 25, 1997.
Enoch Kim et al., "Polymer microstructures formed by moulding in capillaries" Nature, vol. 376, Aug. 17, 1995, pp. 581-584.

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