UPROM memory cell integrable with a tablecloth matrix EPROM

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Details

357 231, 357 29, 357 55, 357 59, H01L 2968, H01L 2978, H01L 2701, H01L 2900

Patent

active

050634240

ABSTRACT:
The UPROM memory cell comprises self-aligned lines of source and lines of drain obtained in a semiconductor substrate. It also comprises a strip of floating gate, a strip of dielectric and a strip of barrier polysilicon, each of these strips being provided with a respective pair of small lateral fins. The UPROM cell lastly comprises a control gate superimposed over and self-aligned with the floating gate.

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patent: 4812885 (1989-03-01), Riemenschneider
patent: 4905062 (1990-02-01), Esquivel et al.

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