Method for the formation of a diffraction grating

Details Method for the formation of a diffraction grating Method for the formation of a diffraction grating

1988-10-05

1991-03-05

Dees, Jose G.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

430 1, 430323, 430329, 350 36, 35016211, G03F 720

Patent

active

049977474

ABSTRACT:
A method for the formation of a diffraction grating on a substrate using a holographic technique and an etching technique, wherein the periodicity of the pattern of the diffraction grating can be changed at will by a change of the light-path length of one of the two light fluxes from a holographic exposing system.

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Koentjoro et al., Japanese J. Appl. Phys. 23(10): L791-L794 (1984).
Utaka et al., Electronics Letters 20(24): 1008-1010 (1984).
Suzuki et al., Proc. Soc. Photo-Optical Instrumentation Engineers 239: 10-18 (1980).
Optical Integrated Circuits (1985) pp. 161 and 168-169.

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