High-precision reflectometer

Details High-precision reflectometer High-precision reflectometer

1980-11-10

1984-03-13

Corbin, John K.

Optics: measuring and testing

By polarized light examination

Of surface reflection

356371, 356445, G01B 1130, G01J 400, G01N 2155

Patent

active

044364261

ABSTRACT:
A reflectometer for precisely measuring the reflectivities of mirrors by performing two sequential measurements each of which is related to a different function of the reflectivities of a reference mirror and the mirror under test. For the first measurement, the two mirrors are arranged so that a beam of light is reflected alternately from the reference mirror and from the test mirror to an output detector to produce an output signal related to the difference of the reflectivities. In the second measurement, the mirrors are positioned so that the beam passes to the output detector directly and, alternately, after reflection from first the reference mirror and then the test mirror, thereby producing an output signal related to the product of the reflectivities. The reflectivity of the test mirror is then calculated from the two output signal quantities.

REFERENCES:
patent: 2808755 (1957-10-01), Millen
patent: 3277773 (1966-10-01), White
patent: 3402631 (1968-09-01), Potter
patent: 3914057 (1974-10-01), Smith et al.
patent: 3972619 (1976-08-01), Stevens

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