Ion beam etching of metal oxide ceramics

Details Ion beam etching of metal oxide ceramics Ion beam etching of metal oxide ceramics

1991-04-30

1993-09-07

Dang, Thi

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156667, 20429836, B23C 300

Patent

active

052425371

ABSTRACT:
An improved infrared detector element and an improved method for manufacturing same is provided. A commercially available rough art wafer of ferroelectric material is ion milled under conditions which provide an extremely thin element with a near flawless detection surface.

REFERENCES:
patent: 4278493 (1981-07-01), Petvai
patent: 4460434 (1984-07-01), Johnson et al.
patent: 4604176 (1986-08-01), Paul
patent: 4750979 (1988-06-01), Gee et al.
patent: 4906594 (1990-03-01), Yoneda et al.
patent: 4986876 (1991-01-01), Zato et al.
Muran et al., "Characteristics of Pyroelectric Vidicon with Reticulated Tet", Ferroelectrics, 1980, vol. 27, pp. 5-8.
Pool et al, "A Pyroelectric Vidicon with Reticulated Target", Ferroelectrics, 1980, vol. 27, pp. 13-16.

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