Gas detecting device and gas detecting system using the same

Details Gas detecting device and gas detecting system using the same Gas detecting device and gas detecting system using the same

1989-05-24

1991-01-15

Williams, Hezron E.

Measuring and testing

Gas analysis

Detector detail

338 34, 422 98, G01N 2712

Patent

active

049844466

ABSTRACT:
A gas detecting device includes a substrate, an insulating layer supported by the substrate, first and second pairs of detection leads formed on the insulating layer, a heater lead formed on the insulating layer, the first and second pairs of detection leads being heated by passing a heater driving current through the heater lead, a gas sensitive layer formed of a gas sensitive material and provided so as to partially make contact with the first and second pairs of detection leads, and a passivation layer formed so as to cover the first and second pairs of detection leads and the heater lead. A gas detection signal is output from the gas sensitive layer through one of the first and second pairs of detection leads. A gas detecting system including the above gas detecting device is also provided.

REFERENCES:
patent: 4358950 (1982-11-01), Chang
patent: 4377944 (1983-03-01), Hishii et al.
patent: 4580439 (1986-04-01), Manaka
T. Oyabu, "Sensing Characteristics of SnO.sub.2 Thin Film Gas Sensor", J. Appl. Phys., 53, 1982, pp. 2785-2787 (p. 65).
H. Ogawa et al., "Electrical Properties of Tin Oxide Ultrafine Particle Films" The Electrochemical Society, vol. 128, No. 9, pp. 2020-2025, 1981 (p. 66).

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