Electrostatic chuck

Details Electrostatic chuck Electrostatic chuck

1999-05-18

2000-10-17

Jackson, Stephen W.

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

H01G 2300

Patent

active

061340960

ABSTRACT:
An electrostatic chuck for attracting an object for treatment. The electrostatic chuck includes a substrate, an insulating dielectric layer and at least one electrode located between the substrate and the insulating dielectric layer. The object is attracted onto the electrode via the insulating dielectric layer. The insulating dielectric layer is between 0.5 mm and 5.0 mm thick, and utilizes a gas-introducing hole to form a gas-diffusing depression on the side of an attractive surface, allowing for more uniform heat conduction. The gas-diffusing depression is between 100 um and 5.0 mm deep. The distance between the bottom surface of the gas-diffusing depression and an electrode may range from 500 .mu.m to 5 mm.

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