Chamber interfacing O-rings and method for implementing same

Details Chamber interfacing O-rings and method for implementing same Chamber interfacing O-rings and method for implementing same

1996-07-09

1998-05-05

Cummings, Scott

Seal for a joint or juncture

Seal between relatively movable parts

Relatively rotatable radially extending sealing face member

277 12, 277189, 414217, 414939, F16J 1502

Patent

active

057464340

ABSTRACT:
Disclosed is a method for implementing a vacuum seal between an interface of a transport chamber interface port of a transport chamber and another chamber. The transport chamber being configured to mate with the another chamber in an adjacent relationship. The method includes placing an insert plate having a sealing surface containing a first O-ring into the transport chamber interface port such that the first O-ring is sandwiched between the sealing surface and a surface of the another chamber. Therefore, a vacuum seal is achieved between the transport chamber and the another chamber within the transport chamber interface port via the first O-ring.

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