Method of making an LED array

Details Method of making an LED array Method of making an LED array

1989-08-29

1991-03-12

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437129, 437127, 437167, 437181, 437905, 437 23, 357 17, 148DIG99, H01L 3300

Patent

active

049993100

ABSTRACT:
A method of making an LED array capable of enhancing an internally generated light density with heterojunction by supporting the LED array with a current injection region by growing heterogeneous film and diffusing a zinc impurity. The improved LED array is capable of producing a high optical power by radiating efficiently a generated light beam without disturbance. To achieve the objects of the present invention, the method comprises: a first process for sequentially growing an n-type junction layer, a p-type radiative layer, a current blocking layer and n-type transparent layer over a semiconductor substrate; a second process for photo-etching the current blocking layer and n-type transparent layer in order to inject current; a third process for diffusing zinc impurity to form current injection region by electrically connecting p-type electrode with p-type radiative layer over the surface of current blocking layer as n-type transparent layer; a fourth process for performing a photo-etching so as to separate each element; and a fifth process for forming respective electrodes over the surface and inside of element.

REFERENCES:
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patent: 4053914 (1977-10-01), Goodwin
patent: 4176367 (1979-11-01), Vematsu
patent: 4280858 (1981-07-01), Van Opdorp et al.
patent: 4297783 (1981-11-01), Casey, Jr. et al.
patent: 4879250 (1989-11-01), Chan

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