Microelectromechanical lateral accelerometer

Details Microelectromechanical lateral accelerometer Microelectromechanical lateral accelerometer

1994-05-19

1997-03-11

Oda, Christine K.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

G01P 1508

Patent

active

056103352

ABSTRACT:
A microelectromechanical accelerometer having submicron features is fabricated from a single crystal silicon substrate. The accelerometer includes a movable portion incorporating an axial beam carrying laterally-extending high aspect ratio released fingers cantilevered above the floor of a cavity formed in the substrate during the fabrication process. The movable portion is supported by restoring springs having controllable flexibility to vary the resonant frequency of the structure. A multiple-beam structure provides stiffness in the movable portion for accuracy.

REFERENCES:
patent: 3498138 (1970-03-01), Stewart
patent: 3835338 (1974-09-01), Martin
patent: 4381672 (1983-05-01), O'Connnor et al.
patent: 4437226 (1984-03-01), Soclof
patent: 4483194 (1984-11-01), Rudolf
patent: 4553436 (1985-11-01), Hansson
patent: 4653326 (1987-03-01), Danel
patent: 4670092 (1987-06-01), Motamedi
patent: 4685198 (1987-08-01), Kawakita et al.
patent: 4706374 (1987-11-01), Murakami
patent: 4711128 (1987-12-01), Boura
patent: 4736629 (1988-04-01), Cole
patent: 4746621 (1988-05-01), Thomas et al.
patent: 4750363 (1988-06-01), Norling
patent: 4772928 (1988-09-01), Dietrich et al.
patent: 4776924 (1988-10-01), Delapierre
patent: 4845048 (1989-07-01), Tamaki et al.
patent: 4851080 (1989-07-01), Howe et al.
patent: 4867842 (1989-09-01), Bohrer et al.
patent: 4945765 (1990-08-01), Roszhart
patent: 4981552 (1991-01-01), Mikkor
patent: 5045152 (1991-09-01), Sickafus
patent: 5072288 (1991-12-01), MacDonald et al.
patent: 5095752 (1992-03-01), Suzuki et al.
patent: 5121180 (1992-06-01), Beringhause et al.
patent: 5126812 (1992-06-01), Greiff
patent: 5149673 (1992-09-01), MacDonald et al.
patent: 5179499 (1993-01-01), MacDonald et al.
patent: 5198390 (1993-03-01), MacDonald et al.
patent: 5205171 (1993-04-01), O'Brien et al.
patent: 5228641 (1993-07-01), Tsuchitani
patent: 5235187 (1993-08-01), Arney et al.
patent: 5249465 (1993-10-01), Bennett
patent: 5314572 (1994-05-01), Core
patent: 5345824 (1994-09-01), Sherman
patent: 5353641 (1994-10-01), Tang
patent: 5357803 (1994-10-01), Lane
Wilson et al., "Highly Selective, High Rate Tungsten Deposition", Materials Research Society, 1985, pp. 35-43.
Zhang et al., "An RIE Process for Submicron, Silicon Electromechanical Structures", IEEE, May 24, 1991, pp. 520-523.
Arney et al., "Formation of Submicron Silicon-on-Insulator Structures by Lateral Oxidation of Substrate Silicon Islands", J. Vac. Sci. Technol. B 6(1), Jan./Feb. 1988, pp. 341-345.
Zhang et al., "A RIE Process for Submicron, Silicon Electromechanical Structures", IOP Publishing Ltd., 1992, pp. 31-38.
Payne et al., "Surface Micromachined Accelerometer: A Technology Update", International Congress and Exposition, Feb. 25-Mar. 1, 1991, pp. 127-135.
Core et al., "Fabrication Technology for an Integrated Surface-Micro-Machined Sensor", Solid State Technology, Oct. 1993, pp. 39-47,
Goodenough, "Airbags Boom When IC Accelerometer Sees 50 G", Electronic Design, Aug. 8, 1991, pp. 45-56.

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