Pumps – Condition responsive variable volumetric capacity expansible...
Reexamination Certificate
2006-11-20
2011-12-27
Freay, Charles (Department: 3746)
Pumps
Condition responsive variable volumetric capacity expansible...
C417S413100, C417S900000, C222S063000
Reexamination Certificate
active
08083498
ABSTRACT:
Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a single-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.
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Cedrone James
Gashgaee Iraj
Gonnella George
Entegris, Inc.
Freay Charles
Hamo Patrick
Sprinkle IP Law Group
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