Methods for pitch reduction formation

Details Methods for pitch reduction formation Methods for pitch reduction formation

2007-08-10

2011-12-27

Mitchell, James (Department: 2813)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S253000, C257S225000

Reexamination Certificate

active

08084353

ABSTRACT:
Methods and apparatus for providing a memory array fabrication process that concurrently forms memory array elements and peripheral circuitry. The invention relates to a method for fabricating memory arrays using a process that concurrently forms memory array elements and peripheral circuitry and results in a reduction in pitch.

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