Polyimide precursor, resin composition comprising the...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

Reexamination Certificate

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C430S270100, C430S281100, C430S283100, C430S288100, C430S325000, C430S326000

Reexamination Certificate

active

08071273

ABSTRACT:
It is a main object of the present invention to provide a polyimide precursor and a polyimide precursor resin composition, which precursor being easy to synthesize, available at low cost, excellent in storage and capable of giving polyimide that is low in impurities after imidization, irrespective of the chemical structure of the finally-obtained polyimide.It is another object of the present invention to provide a polyimide precursor having repeating units represented by the following formula (1) and a photosensitive resin composition comprising the polyimide precursor and a photoacid generator or photobase generator:In the formula (1), R1is a tetravalent organic group; R2is a divalent organic group; R1s may be the same or different from each other and R2s may be the same or different from each other in the repeating units; R3and R4respectively represent a monovalent organic group having a structure represented by the following formula (2) and may be the same or different from each other; and R3s and R4s in the repeating units may be the same or different from each other, respectively. In the formula (2), R5, R6and R7respectively represent a hydrogen atom, a halogen atom or a monovalent organic group; R8is a monovalent organic group; R8s in the repeating units may be the same or different from each other; 35 mole % or less of R8s are organic groups having a reactive group; and R5, R6, R7and R8may be bonded to each other to form a ring structure.

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