Electronic device including MEMS devices and holed...

Details Electronic device including MEMS devices and holed... Electronic device including MEMS devices and holed...

2010-12-15

2011-10-25

Valentine, Jami M (Department: 2894)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C438S125000, C257S415000, C257S698000, C257SE23190, C257SE29324, C257SE21500

Reexamination Certificate

active

08043881

ABSTRACT:
An electronic device includes a substrate provided with a passing opening and a MEMS device including an active surface wherein a portion of the MEMS device is integrated sensitive to chemical/physical variations of a fluid. The active surface of the MEMS device faces the substrate and is spaced therefrom, the sensitive portion being aligned to the opening. A protective package incorporates at least partially the MEMS device and the substrate, leaving at least the sensitive portion of the MEMS device, and the opening of the substrate exposed. A barrier element is positioned in an area which surrounds the sensitive portion to realize a protection structure for the MEMS device, so that the sensitive portion is free.

REFERENCES:
patent: 6624003 (2003-09-01), Rice
patent: 2001/0007733 (2001-07-01), Matsuyama et al.
patent: 2002/0054422 (2002-05-01), Carr et al.
patent: 2003/0059976 (2003-03-01), Nathan et al.
patent: 2005/0120553 (2005-06-01), Brown et al.
patent: 2005/0263841 (2005-12-01), Fincato
patent: 2006/0086899 (2006-04-01), Chao et al.
patent: 2006/0128058 (2006-06-01), Dungan et al.
patent: 2006/0148137 (2006-07-01), Hartzell et al.
patent: 2008/0164543 (2008-07-01), Ziglioli et al.
patent: 2008/0179697 (2008-07-01), Cortese et al.
patent: 1775259 (2005-10-01), None
patent: 1945561 (2008-07-01), None

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