Linear motor, stage apparatus and exposure apparatus

Details Linear motor, stage apparatus and exposure apparatus Linear motor, stage apparatus and exposure apparatus

2006-01-20

2011-11-08

Lam, Thanh (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C310S012210, C310S012240

Reexamination Certificate

active

08053937

ABSTRACT:
A linear motor is equipped with a coil body (62), and a yoke (71) that supports a magnetism generating body (72) and that moves relative to the coil body (62). The yoke (71) has a first portion (73) that is formed from a magnetic material and disposed based on the saturation state of the magnetic field, which is generated by the magnetism generating body (72), in the yoke (71).

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International Search Report issued for PCT/JP2006/300827 on Apr. 18, 2006 with an English Translation.
Written Opinion issued for PCT/JP2006/300827 on Apr. 18, 2006 with an English Translation.
May 24, 2011 Office Action issued in Japanese Patent Application No. 2006-553961 (w/English-language Translation).

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