Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2008-08-27
2011-10-04
Stark, Jarrett (Department: 2823)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S485000, C438S680000, C438S788000, C136S246000
Reexamination Certificate
active
08030206
ABSTRACT:
A solar cell fabrication process is described that includes etching a cap layer into a front surface of a semiconductor structure, depositing an anti-reflective coating onto the front surface of the semiconductor structure, forming a front electrical contact on the front surface of the semiconductor structure, forming a first back metal contact on a back surface of the semiconductor structure, utilizing a plasma enhanced chemical vapor deposition (PECVD) process to apply a dielectric layer to the first back metal contact, the PECVD process performed at within a temperature environment and for a duration that allows for the annealing of metal associated with the front electrical contact and the first back metal contact, and attaching at least one secondary electrical contact to the dielectric layer.
REFERENCES:
patent: 4249959 (1981-02-01), Jebens
patent: 4322571 (1982-03-01), Stanbery
patent: 4450033 (1984-05-01), Little
patent: 5217539 (1993-06-01), Fraas et al.
patent: 6147297 (2000-11-01), Wettling et al.
patent: 6974768 (2005-12-01), Kailasam
patent: 7285720 (2007-10-01), Kukulka et al.
patent: 7339109 (2008-03-01), Stan et al.
patent: 7339110 (2008-03-01), Mulligan et al.
patent: 7377836 (2008-05-01), Molnar
patent: 2007/0137697 (2007-06-01), Kempa et al.
patent: 2007/0175507 (2007-08-01), Dutta
patent: 2007/0235074 (2007-10-01), Henley et al.
patent: 2008/0149177 (2008-06-01), Stan et al.
Kerschaver, E.; Back-Contact Solar Cells: A Review; Progress in Photovoltaics: Research and Applications; Dec. 2005; pp. 107-123.
Sherif, R. et al.; High Performance, Low-Cost III-V Concentrator Module; Spectrolab Inc.; pp. 261-262.
Danzilio, D.; Overview of EMCORE's Multi-Junction Solar Cell Technology and High Volume Manufacturing Capabilities; CS MANTECH Conference; May 14-17, 2007; Austin, TX; pp. 11-14.
Sherif, R. et al.; High Performance, Low-Cost III-V Concentrator Module; Spectrolab Inc.; dated Oct. 14-17, 2001; pp. 261-262.
Hoskin Julie
Zhang Xiaobo
Armstrong Teasdale LLP
Stark Jarrett
The Boeing Company
Tobergte Nicholas
LandOfFree
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