Treatment of low dielectric constant films using a batch...

Details Treatment of low dielectric constant films using a batch... Treatment of low dielectric constant films using a batch...

2005-09-30

2011-10-18

Meeks, Timothy (Department: 1715)

Coating processes

Coating by vapor, gas, or smoke

C118S715000, C118S719000

Reexamination Certificate

active

08039049

ABSTRACT:
A method and system for treating a dielectric film in a batch processing system includes exposing at least one surface of the dielectric film to a treating compound including a CxHycontaining compound, where x and y represent integers greater than or equal to unity. The plurality of wafers are heated when the treating compound is introduced. The dielectric film can include a low dielectric constant film with or without pores having an etch feature formed therein following dry etch processing.

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