Method of making microminiature moving device

Details Method of making microminiature moving device Method of making microminiature moving device

2008-12-05

2011-10-25

Coleman, William D (Department: 2823)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C438S051000, C438S048000, C438S436000, C257S415000, C257S623000, C257S432000, C257SE21613, C257SE29324, C029S592000, C029S592100

Reexamination Certificate

active

08043882

ABSTRACT:
A microminiature moving device has disposed on a single-crystal silicon substrate movable elements such as a movable rod and a movable comb electrode that are displaceable in parallel to the substrate surface and stationary parts that are fixedly secured to the single-crystal silicon substrate with an insulating layer sandwiched between. Depressions are formed in the surface regions of the single-crystal silicon substrate where no stationary parts are present and the movable parts are positioned above the depressions. The depressions form gaps large enough to prevent foreign bodies from causing shorts and malfunctioning of the movable parts.

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Office action dated Aug 18, 2009 for priority patent application No. JP 2005-010514.

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