Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate
2008-05-30
2011-12-13
Geyer, Scott B (Department: 2812)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
Insulated gate formation
Reexamination Certificate
active
08076229
ABSTRACT:
Disclosed are methods and devices, among which is a method that includes forming a lower conductive material on a substrate, forming a stop material on the substrate, forming a sacrificial material on the substrate, etching the sacrificial material with an etch that is selective to the sacrificial material and selective against the stop material, and etching the lower conductive material.
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Fletcher Yoder
Geyer Scott B
Micro)n Technology, Inc.
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