Semiconductor device and method of producing the same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257329, 257330, 257335, H01L 29792

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active

058775277

ABSTRACT:
In a semiconductor device having a substrate, a p-type semiconductor layer, an n-type channel well region, a p-type lightly doped source region, and a source electrode formed on the substrate in this order, a p-type heavily-doped source region, an impurity concentration of which is higher than that of the lightly-doped source region, is formed in a surface region of the lightly-doped source region. The source electrode is formed to contact the heavily-doped source region. As a result, a punch through phenomenon between the p-type source region and the p-type semiconductor layer through the n-type channel well region can be prevented without increasing in the On resistance of the semiconductor device.

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patent: 5124764 (1992-06-01), Mori
patent: 5155052 (1992-10-01), Davies
patent: 5248627 (1993-09-01), Williams
patent: 5250449 (1993-10-01), Kuroyamagi et al.
patent: 5298780 (1994-03-01), Harada
patent: 5460986 (1995-10-01), Tam et al.
patent: 5473176 (1995-12-01), Kakumoto
Dialog File 347: JAPIO English Abstract of JP56-96865 Aug. 1981.

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