Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate
2007-10-24
2010-11-30
Nguyen, Kiet T (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
With detector
C250S310000, C250S311000
Reexamination Certificate
active
07842930
ABSTRACT:
A charged particle detector assembly comprises a particle detector, which has at least one particle sensitive region for detecting at least a portion of the spatial distribution of charged particles and for generating a two-dimensional optical signal which correlates to the detected spatial distribution. Further, an image conduit has an input coupled to the particle sensitive region of the particle detector for transmitting the two-dimensional optical signal to at least one optical detector. Further, a selecting means is adapted for selecting at least a portion of the two-dimensional optical signal.
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Extended European Search Report dated May 8, 2007.
Adamec Pavel
Almogy Gilad
Shemesh Dror
ICT Integrated Circuit Testing Gesellschaft für Halbleiterp
Nguyen Kiet T
Patterson & Sheridan L.L.P.
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