Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate
2007-10-26
2010-06-08
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
C250S306000, C250S307000
Reexamination Certificate
active
07732766
ABSTRACT:
A crystal thin film is adopted as a specimen for measurement. A change in the contrast of crystal lattice fringes is measured under a condition that a diffracted wave and other wave are caused to interfere with each other. Thus, an information transfer limit of a transmission electron microscope can be measured quantitatively. Since the measurement is performed with a condition for interference restricted, the information transfer limit of the transmission electron microscope can be quantitatively assessed.
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A. Marquez, Esq. Juan Carlos
Berman Jack I.
Hitachi , Ltd.
Purinton Brooke
Stites & Harbison PLLC
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