Method for measuring information transfer limit in...

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type

Reexamination Certificate

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C250S306000, C250S307000

Reexamination Certificate

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07732766

ABSTRACT:
A crystal thin film is adopted as a specimen for measurement. A change in the contrast of crystal lattice fringes is measured under a condition that a diffracted wave and other wave are caused to interfere with each other. Thus, an information transfer limit of a transmission electron microscope can be measured quantitatively. Since the measurement is performed with a condition for interference restricted, the information transfer limit of the transmission electron microscope can be quantitatively assessed.

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